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NanoFab 100 is a modular platform, which is developed to assemble nanotechnology facilities (NTF) with the cluster arrangement of their modules, including systems that are capable of treating substrates as big as 100 mm using batch and local techniques. The nano clusters are linked into the technology chain by means of special intermediate modules, which are used both to transport and to store samples. All this makes it possible to assemble Nanotechnology Factory to fabricate fully functional nano-structures, nano-devices and nano-systems.

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NT-MDT

Building 100, Zelenograd, Moscow 124482, Russia

nt-mdt@made-in-zelenograd.com

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