Technical data:

  • Horizontal single reactor electric oven with resistance heating
  • Quartz reactor with sealable work zone
  • Three-section spiral heater with platinum thermocouple in each section
  • High frequency generator with the possibility to control generatorĺs capacity in operation
  • Multi-channel gas system with electronic flow control gas valves, pressure control valves and fine filters
  • Small-sized oil-free chemically stable fore-vacuum system
  • Self-contained water-based cooling system
  • Control system of reactorĺs sealing
  • High layers deposition speed at low temperature (250…400 °C)
  • High uniformity of coating
  • Small radiation damage
  • Microprocessor-based process control system
  • Clean-room compatibility

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Made in Zelenograd

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