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Manufacturer

MESH plus

124489, Russia, Moscow, Zelenograd, Eastern-communal zone, proezd 4921, str.1

info@meshplus.ru

Machine of high-speed magnetron deposition MESH-60 consists of processing chamber with front door, plate, pumping system, power-supply and control rack. There is a carrousel with a vertical axis of rotation and underneath drive in the processing chamber. Items are being fixed on easily detachable carriers. Outside the chamber on the sexless flanges are mounted 4 high-speed magnetron-sputtering sources, ionic source, and calefactor. Arc evaporimeters could be used as an additional option.

Main technical characteristics
*Measurements of carriers of working pieces, mm90×400
*Number of carriers on the carrousel, pcs20
Duration of vacuum pumping/technological cycle, min20/ from 30
Controlling of pumping cycleSemi-automatic
Power supply3×380 V/ 50 Hz
Water flow (pressure 4-6 atm.), m3/h (Cold/Warm)1/ 0.2
Overall dimensions (length width height), mm2250×3800×2150

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Made in Zelenograd

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