Building 100, Zelenograd, Moscow 124482, Russia


General information


The basic system that gives an opportunity of studying physical properties of the surface, using almost any available SPM method with atomic-molecular resolution. It serves as the basis for the creation of more specialized systems.


SPM for the research in the controlled gas and in low vacuum environments. Specialization measuring light forces (electric, magnetic, adhesive, etc.)


SPM with unprecedented low level of thermal drifts (less than 10 nm/ C). It allows carrying out precise manipulations on very small fields (<100nm) and put into practice long-term measurements of single nanoobjects. It provides extremely high stability of measurements in the terms of changing temperature. Build-in Nova PowerScript macro language for automated system management allows carrying out unique experiments.

NTEGRA Solaris

Scanning near-field optical microscope (SNOM). Specialization investigation of optical properties beyond the limit of a visible light diffraction (resolution of 30 nm).

NTEGRA Spectra

Integration of SPM and confocal microscopy/Raman scattering spectroscopy. Owing to the effect of giant amplification of Raman scattering (TERS Tip Enhances Raman Scattering) it allows carrying out spectroscopy studies and obtaining images with 50nm resolution.


Integration of SPM and inverted microscope. Specialization molecular and cellular examinations of biological objects in the environment close to the physiological one.


Integration of SPM and ultra microtome. It allows obtaining layer-by-layer images of the sample and reconstructing a 3D model of nanosized inclusions. It can complete TEM data obtained on the same sample slices.

NTEGRA Maximus

SPM for the study of large (up to 100mm) samples. It allows carrying out serial measurements in the semi-automatic mode.

Platform key features

The platform unites eight specialized research systems. Each of them has three key features, which are common for the platform as a whole:

  1. Specialization provides the maximum quality level. Each research system was designed for the individual range of special functions. Specification of each NTEGRA system meets and sometimes exceeds the highest world standards in the specific area.
  2. The modular design allows easily changing the systems specialization. Each system has a certain number of components and units, which are common for every model of the platform. That is why the modification (turning one specific system to another) is made by replacing or adding the units.
  3. The concept of Nanolaboratory is the integration of SPM and various other research techniques. In the beginning of the platforms development there was a goal to provide maximum integration with non-SPM methods (inverted microscopy, confocal scanning microscopy, spectroscopy, etc.). This goal has been successfully reached. NTEGRA platform offers carrying out a great number of interdisciplinary studies in almost any experimental scientific field.


Environmental control options

  • The PNL NTEGRA is equipped with precision temperature alteration and control facilities. This gives the opportunity to vary the sample temperature from -30 oC to 300 oC. Therefore measurements of such phenomena as structural changes at the surface of specimens (due to crystallization, melting, growth processes etc.) are possible.
  • A special thermohead featuring a very low thermal drift ensures high temperature stability of the tip-sample system. This allows long-term experiments to be done at pre-defined points on the specimen surface.
  • The PNL NTEGRA includes a closed flow-thru liquid cell with an option of heating its cotents up to 60 oC. Therefore measurements in liquid environment, which are very important for biological, chemical and some material applications, are possible. Biological objects, such as living cells and interacting macromolecules, can now be observed in close-to-native conditions.
  • The base unit can be enclosed within a specially designed cast metal hood equipped with a set of feedthroughs. This hood seals the system hermetically and, using a rotary pump, can operate both in vacuum (10-2 Torr) and in a controlled gas atmosphere. This extends the system performance and enables researchers to study and modify nanostructures in various rarefied gas environments with a controlled gas composition.

Optical measurements

  • The inverted optical microscope is a one of the main instruments in the research of transparent samples. Its combination with the SPM parts of the PNL NTEGRA leads to the molecular scale detalization of images that are typically obtained with the micron resolution using a stand-alone optical microscope. In this set-up the microscope objective is inserted into a special optical measuring head mount of the PNL NTEGRA. This secures high mechanical rigidity and stability of the system making it possible to get high quality images during long-term measurements. Bright-field and fluorescence microscopy is also available in this configuration.
  • A different optical scheme has been realized to meet the requirements of simultaneous SPM investigations with visualization of non-transparent objects. In this scheme a high numerical aperture video microscope objective with long working distance is integrated into a special head which allows observation of the area normally obscured by the cantilever for a direct view. This unique set-up gives the opportunity to inspect specimens with a high optical resolution (up to 0.4 um), then select the region of interest and finally analyse it with the SPM achieving a resolution of several nanometers. The video microscope objective can also be employed to deliver an appropriate laser beam underneath the cantilever to investigate local spectral properties of the object.
  • These SPM assemblies can be useful in biology, material science etc.


NT-MDT has developed a new universal controller which supports all kind of SPM designed by our company. AFM 9 gives the freedom of unlimited research capabilities. Use of the most high-end technologies makes possible to increase productivity of data processing.

We improved some characteristics for your comfort. High performance DSP, fast ADC-s and expanded nomenclature of user inputs/outputs enrich functionality.

General information

NTEGRA Prima is a multifunctional device for performing the most typical tasks in the field of Scanning Probe Microscopy.

The device is capable of performing more than 40 measuring methods, what allows analyzing physical and chemical properties of the surface with high precision and resolution. It is possible to carry out experiments in air, as well as in liquids and in controlled environment. The new generation electronics provides operations in high-frequency (up to 5MHz) modes. This feature appears to be principal for the work with high-frequency AFM modes and using high-frequency cantilevers.*

There are several scanning types implemented in NTEGRA Prima: scanning by the sample, scanning by the probe and dual-scanning. On account of that, the system is ideal for investigating small samples with ultra-high resolution (atomic-molecular level) as well as for big samples and scanning range up to 100x100x10 m. The unique DualScan TM mode allows investigating even bigger fields on the surface (200x200 m for X, Y and 22 m for Z) that can be useful, for example, for living cells and MEMS components.

Built-in three axes closed loop control sensors trace the real displacement of the scanner and compensate unavoidable imperfections of piezoceramics as non-linearity, creep and hysteresis. The sensors, which are used by NT-MDT, have the lowest noise level, thus allowing working with closed loop control on the very small fields (down to 10x10 nm). This is especially valuable for carrying out nanomanipulation and lithography modes.

NTEGRA Prima has a built-in optical system with 1 m resolution, which allows imaging the scanning process in real-time.

Due to the open architecture, the functionality of NTEGRA Prima can be extended essentially: specialized magnetic measurements with external magnetic field, high-temperature experiments, Near-field optical microscopy, Raman spectroscopy, etc.

E.g. the unique method of Atomic-Force Acoustic Microscopy (AFAM) allows investigating soft and hard samples with carrying out quantitative measurements of Young modulus in every scanning point. AFAM allows obtaining much better contrast as compared to Phase Imaging Mode for the soft objects, and makes possible the obtainment of contrast on the hard samples, what is a very hard task when one uses other methods.

Key features

  • closed loop control with the lowest noise level (can be used for scanning fields of <100 nm)
  • optical microscope with the resolution of 1m
  • scanning by sample (the lowest noise level, the best resolution on the small fields), scanning by probe (maximum scanning range, working with large samples)
  • more than 40 measuring modes, including unique ones
  • carrying out experiments in air, in liquids, in controlled environment
  • possibility of expanding functionality


Measuring modes

  • In ambient air: STM/ STS/ AFM (contact + noncontac + semicontact)/ LFM/ Phase Imaging/ Force Modulation mode/ Spreading Resistance Imaging/ MFM/ EFM/ SCM/ Kelvin mode/ Adhesion Force Imaging/ AFAM/ AFM Lithographies: Force (scratching + dynamic plowing), Current (Local Anodic Oxidation), STM
  • In liquid: AFM (contact + semicontact)/ LFM/ Phase Imaging/ Force Modulation mode/ Adhesion Force Imaging/ AFM Lithography


  • Biology and Biotechnology - Proteins, DNA, viruses, bacteriums, tissues
  • Materials Science - Surface morphology, surface morphology, local piezoelectric properties, local adhesion properties, local tribological properties
  • Magnetic materials - Magnetic domain structure visualization, observation of magnetization reversal processes that depend on external magnetic field, observation of magnetization reversal processes under different temperatures
  • Semiconductors, electric measurements - Wafers and other structures morphology, local surface potential and capacitance measurements, electric domain structure imaging, determination of heterojunction bounds and semiconductor regions with different doping levels, failure analysis (localization of conductor line failure and leakage in dielectric layers)
  • Polymers and Thin Organic Films - Spherulites and dendrites, polymer monocrystals, polymer nanoparticles, LB-films, thin organic films
  • Data storage devices and medias - CD, DVD disks, storages for terabit memories with thermomechanical, electric and other types of recording
  • Nanomaterials - Nanopowders, nanocomposites, nanoporous materials
  • Nanostructures - Fullerenes, nanotubes, nanofilaments, nanocapsules
  • Nanoelectronics - Quantum dots, nanowires, quantum structures
  • Nanomachining - AFM lithography: force (ac and dc), current (Local anodic oxidation), STM lithography
  • Nanomanipulations - Contact force

Optional features

  • optical system with resolution of 0.4 m
  • work in low vacuum (10-2 Torr)
  • heating the sample up to 3000 with temperature maintaining precision of 0.050
  • femto-ampere currents measuring, 30fA - 100pA range
  • measurements in liquids with heating up to 600
  • electro-chemical AFM and STM measurements
  • unique Atomic-Force Acoustic Microscopy (AFAM) method
  • contact Scanning Capacitive Mode
  • fast signals registration
  • nanoindentation

General information

NTEGRA Aura is a Scanning Probe Microscope for studies in the conditions of controlled environment and low vacuum.

The Q-factor of the cantilever in vacuum increases, thus gaining the sensitivity, reliability and accuracy of probe-sample light forces measurements. At that, the change from atmosphere pressure to 10-2 Torr vacuum provides the tenfold gain of Q-factor. By further vacuum pumping, Q-factor reaches its plateau and changes insignificantly. Thus, NTEGRA Aura presents the optimal price/quality ratio: comparing to the high-vacuum devices it needs much less time only one minute - to get the vacuum that is needed for the tenfold Q-factor increase. At the same time the system is compact and easy to operate and maintain. As the NTEGRA platform product, NTEGRA Aura has built-in closed loop control for all the axes, optical system with 1 m resolution and ability to work with more than 40 different AFM methods.

Due to the open architecture, the functionality of NTEGRA Aura can be widen essentially: specialized magnetic measurements with external magnetic field (horizontal, up to +/-0.2T; vertical, up to +/-0.02T), high-temperature experiments (heating up to 3000 with temperature maintaining precision of 0.050 ), etc.

Key features

  • measurements with no negative effect of surface adsorbed substance
  • high sensitivity of two-pass methods owing to the increased Q-factor in vacuum
  • full range of electric and magnetic methods (SRI, SCM contact and non-contact, SKM, MFM, PFM, EFM, DFM)
  • motorized X,Y positioning
  • closed loop control with the lowest self-induced noise level is suitable for work on very small fields (<100 nm)
  • possibility of expanding functionality


NTEGRA Aura allows to carry out the research of surface characteristics with nanometric resolution and near-surface physical fields of various objects that can be placed into vacuum.

Optional features

  • specialized magnetic measurements with external magnetic field (horizontal, up to +/-0.2T; vertical, up to +/-0.02T)
  • heating the sample up to 300 0 with temperature maintaining precision of 0.050
  • femto-ampere currents measuring, 30fA - 100pA range
  • measurements in liquids with heating up to 600
  • electro-chemical AFM and STM measurements
  • contact Scanning Capacitive Mode
  • nanoindentation

General information

NTEGRA Therma is the SPM with the lowest level of thermal drifts. In every Scanning Probe Microscope there is a certain thermal drift an uncontrolled shifting of the probe relative to the sample, which is caused by the existence of temperature gradients. The irregular scaling of parts of the device leads to mutual shifting of the probe and the sample in time. In commercial SPMs the drift is usually about 20-50 nm per hour. This sort of the drift is not critical in case the investigations are carried out on big fields. But for the tasks where the scan size totals in tens of nanometer, the thermal drift becomes a crucial aspect. If there is a key object of investigation on a small scanning field, e.g. nanoparticle, and one needs to obtain series of images of this very nanoparticle in every 30 minutes, there is no commercial SPM, which can do this. NanoLaboratory NTEGRA Therma is the only system, which is capable of performing this task. The influence of temperature gradients has a huge meaning in the cases when the samples temperature must be changed during the investigation process. The range of uncontrolled shifting in this case is about 50-300 nm per K, i.e. when heating or cooling a sample for 10 one must be ready to see the drift up to 3 m. NanoLaboratory NTEGRA Therma was designed as SPM with the lowest possible level of thermal drifts. The thermal drift in NTEGRA Therma is less than 10 nm per K. That is owing to the symmetry of construction of the measuring unit, thorough selection of materials taking into account their coefficient of thermal expansion and because of double contour of inner heat setting.

It is impossible to avoid thermal drifts completely but the originality of NTEGRA Therma is in the mutual shifting of the probe and the sample for changing temperatures, which minimizes the influence of the temperature on the quality of obtained SPM data.

Key features

  • Extremely low thermal drift for the constant temperature (<3 nm/h)
  • Extremely low thermal drift for the changing temperature (<10 nm/h)
  • Capability of obtaining images and manipulating on very small scanning fields (<100 nm) with enabled closed loop control
  • Heating the sample up to 3000 and cooling down to -300 with temperature maintaining precision of 0.050
  • Possibility of expanding functionality


NTEGRA Therma is used for carrying out of measurements by contact and semi-contact methods with heating a sample up to 200C.

NTEGRA Therma is used for work with Polymers and Thin Organic Films:

  • Spherulites and dendrites
  • Polymer monocrystals
  • Polymer nanoparticles
  • LB-films
  • Thin organic films

General information

Scanning near-field optical microscopy (SNOM) gives an ability to study optical properties of the sample (reflectivity, light transmission, light scattering) with the spatial resolution of tens of nanometer. In contrast to a common optical microscope, which resolution is restricted by the diffraction limits (near 170 nm for the blue light in the confocal conditions), the resolution of SNOM is determined only by the size of the aperture of the optical probe. It is a hole in the metal coating of the optical fiber tip, which is used as the channel for transferring the laser light to the sample.

There is a lens-holder with 100 m Z-scanner in the interchangeable base of the system. The mechanical rigidity of the construction allows using immersion high-aperture lenses.

Key features

  • Studying optical properties with the resolution of 30 nm
  • Capability of simultaneous collection of the transmitted and reflected photons
  • Unexampled high resolution when working with fluorescent-colored objects
  • Open system architecture
  • Capability of using the measuring head in Stand Alone mode


  • Investigations of biological objects
  • Quality control of optical components surfaces
  • Radiating semiconductor structures
  • Nanoopticals and integrally-optical elements parameters, particularly quantum dots spectrums

Optional features

  • Measuring in liquids
  • Laser confocal scanning microscope/spectroscope

General information


Is a unique integration of Scanning Probe Microscope and confocal microscopy/luminescence and Raman scattering spectroscopy. Owing to the effect of huge tip enhanced Raman scattering it allows carrying out Raman spectroscopy and obtaining images with resolution up to 50 nm.

Only NTEGRA Spectra provides fully technical integrated with Renishaw spectrometer solution in terms of software, hardware, and concept for interdisciplinary science at the molecular level. As a result of such union, researcher can obtain optimum efficiency and more time for investigations which allow to focus on data collection and analysis. So it is safe to say: real integration is better than just a combination.

Confocal optical microscopy/spectroscopy system

NTEGRA Spectra nanolaboratory is a system that combines confocal scanning laser spectrometer, optical microscope and universal scanning probe microscope. The system is capable of working in the mode of registration of spatial 3D distribution of luminescence spectrum and Raman light scattering, as well as various scanning probe microscopy modes that include nanoindentation, nanomanipulation and nanolithography.

Scanning probe microscopy system

Along with the optical observation, NTEGRA Spectra allows investigating the object with a set of SPM methods: AFM, MFM, STM, Scanning Near-field Optical Microscopy, Force spectroscopy. The unique combination of optical and probe methods in one device allows carrying out complex experiments, which will provide the researcher with information on the distribution of optical properties and the objects chemistry overlapped with the mechanical, electrical and magnetic properties data.

System for the investigation of optical properties beyond the diffraction limit

The distinguishing feature of NTEGRA nanolaboratory is the capability of studying optical properties of objects beyond the diffraction limits. Scanning Near-field Optical Microscopy and the effect of local tip enhanced Raman scattering provides the researcher with the tools for mapping the optical properties distribution (light transmission, light scattering, light polarization, etc.) as well as carrying out Raman scattering spectroscopy with flat XY resolution up to 50 nm.

  • Atomic Force Microscopy ( > 30 modes )
  • Confocal Raman / Fluorescence / Rayleigh Microscopy
  • Scanning Near-Field Optical Microscopy ( SNOM / NSOM )
  • Optimized for Tip Enhanced Raman and Fluorescence (TERS, TEFS, TERFS) and scattering SNOM (s-SNOM)


  • AFM (mechanical, electrical, magnetic properties, nanomanipulation etc.)
  • White Light Microscopy and Confocal Laser (Rayleigh) Imaging
  • Confocal Raman Imaging and Spectroscopy
  • Confocal Fluorescence Imaging and Spectroscopy
  • Scanning Near-Field Optical Microscopy ( SNOM / NSOM )
  • Tip Enhanced Raman and Fluorescence Microscopy (TERS, TEFS, TERFS)

Controlled environment:

  • Temperature
  • Humidity
  • Gases
  • Liquid
  • Electrochemical environment
  • External magnetic field

New era of integration

Optical AFM (NT-MDT) + Raman spectrometer (Renishaw) = Join the best technologies in one system

Key features

Inverted setup:

  • Optimized for transparent samples
  • Highest optical resolution achievable (<200 nm) simultaneously with AFM
  • Highest efficiency of Raman / fluorescence Photon collection (with immersion optics) simultaneously with AFM
  • Probe scanning in addition to sample scanning (important for TERS)
  • Equipped with heating stage, temperature controlled liquid cell, environmental chamber, external magnet
  • Fits most commercial inverted microscopes, supporting advanced imaging modes

Upright setup:

  • Optimized for opaque samples
  • Highest optical resolution (400 nm) simultaneously with AFM
  • Highest efficiency of Raman / fluorescence photon collection simultaneously with AFM
  • Beam scanning in addition to sample scanning (necessary for TERS)
  • Equipped with heating stage, liquid cell, environmental chamber

Can work with cantilevers (contact, intermittent contact and other modes: more than 30)

and with metal tips (STM mode, shear force mode, normal force mode)

Technical characteristics

Confocal Raman/Fluorescence microscopy

Confocal Raman/Fluorescence/Rayleigh imaging runs simultaneously with AFM (during one sample scan)

Diffraction limited spatial resolution: <200 nm in XY, <500 nm in Z (with immersion objective)

True confocality; motorized confocal pinhole for optimal signal and confocality

Motorized variable beam expander/collimator: adjusts diameter and collimation of the laser beam individually for each laser and each objective used

Full 3D (XYZ) confocal imaging with powerful image analysis

Hyperspectral imaging (recording complete Raman spectrum in every point of 1D, 2D or 3D confocal scan) with further software analysis

Optical lithography (vector, raster)

AFM/STM: Integration with spectroscopy

Upright and Inverted optical AFM configurations (optimized for opaque and transparent samples correspondingly);

side illumination option

Highest possible resolution (numerical aperture) optics is used simultaneously with AFM: 0.7 NA for Upright, 1.31.4 NA for Inverted

AFM/STM and confocal Raman/Fluorescence images are obtained simultaneously (during one scan)

All standard SPM imaging modes are supported (>30 modes) combined with confocal Raman/Fluorescence

Low noise AFM/STM (atomic resolution)

Vibrations and thermal drifts originating from optical microscope body are minimized due to special design of optical AFM heads

Focus track feature: sample always stays in focus due to AFM Z-feedback; high quality confocal images of very rough or inclined samples can be obtained


Seamless integration of AFM and Raman; all AFM/ Raman/SNOM experiment and further data analysis is performed in one and the same software

Powerful analysis of 1D, 2D and 3D hyperspectral images

Powerful export to other software (Excel, MatLab, Cytospec etc.)


  • Extremely high efficiency 520 mm length spectrometer with 4 motorized gratings
  • Visible, UV and IR spectral ranges available

Echelle grating with ultrahigh dispersion; spectral resolution: 0.007 nm (< 0.1 1/cm)**

Up to 3 different detectors can be installed

  • TE cooled (down to -100 ?C) CCD camera. EMCCD camera is optional for ultrafast imaging
  • Photon multiplier (PMT) or avalanche photodiode in photon counting mode
  • Photon multiplier for fast confocal laser (Rayleigh) imaging

Flexible motorized polarization optics in excitation and detection channels, cross-polarized Raman measurements

Fully automated switch between different lasers with a few mouse clicks

Scanning Near Field Optical Microscopy (SNOM)

Two major SNOM techniques supported: (i) based on quartz fiber probes, (ii) based on silicon cantilever probes

All modes supported: Transmission, Collection, Reflection

All SNOM signals detected: laser intensity, fluorescence intensity, spectroscopy

SNOM lithography (vector, raster)

Optimized for Tip Enhanced Raman Scattering (TERS) and other tip-related optical techniques

All existing TERS geometries are available: illumination/ collection from bottom, from top or from side

Different SPM techniques and TERS probes can be used: STM, AFM cantilever, quartz tuning fork in tapping and shear force modes

Dual scan (for Hot Point Mapping in TERS): scan by sample AND scan by tip / by laser spot

Motorized polarization optics to produce optimal polarization for TERS

AFM-Raman measurements can run in air, in controlled atmosphere or in liquid all with variable temperature

Some features listed are optional not included into basic system configuration

* NT-MDT AFM can be integrated with Renishaw inVia or with NT-MDT spectrometer. Specifications are given for the latter. Renishaw specifications can be found at www.renishaw.com/AFM-Raman

** Exact value of spectral resolution highly depends on how resolution is defined


  • Graphene, carbon nanotubes and other carbon materials
  • Semiconductor devices
  • Nanotubes, nanowires, quantum dots and other nanoscale materials
  • Polymers
  • Optical device characterization: semiconductor lasers, optical fibers, waveguides, plasmonic devices
  • Investigation of cellular tissue, DNA, viruses and other biological objects
  • Chemical reaction control

General information

Biologists usually deal with optical microscopy that is why NTEGRA Vita as the specialized device for molecular and cellular biology presents the integration of inverted microscope and Scanning Probe Microscope. Beside the great choice of liquid cells special cameras that provide different conditions for work in liquids nanolaboratory has another feature that makes it the key tool for biological tasks. This is the capability of integration of additional methods. For example, the functionality of optical microscope can be significantly expanded by turning it into confocal laser scanning microscope/spectroscope (NTEGRA Spectra). The universality of SPM platform allows interchanging the AFM units with Scanning Near-field Optical Microscopy easily that makes it capable of studying the optical properties of an object far beyond the diffraction limits (NTEGRA Solaris).

Key features

  • Integration of SPM and methods of optical (fluorescent) microscopy
  • Investigation of mechanical properties on the molecular and cellular
  • A great choice of conditions for the investigation of living objects


Measuring modes

  • Contact AFM
  • Semicontact AFM
  • Lateral Force Imaging
  • Adhesion Force Imaging
  • Force Modulation Mode
  • Phase Imaging Mode
  • AFM Litography

Model NTEGRA Vita is designed for biological applications, for investigations of Proteins, DNA, viruses, bacteriums, tissues.

Optional features

  • Electrochemical AFM and STM investigations
  • Scanning Near-field Optical Microscopy
  • Confocal laser scanning microscope/spectroscope

General information

NTEGRA Tomo is the unique integration of Scanning Probe Microscope and ultra microtome. The fundamental feature of Atomic-Force Microscope (AFM) is surface-only investigation of objects. Nanolaboratory NTEGRA Tomo was designed for studying the inner structure of the objects with huge range of AFM methods paired with ultra microtome. The principle of AFM tomography is as follows: ultra microtome slices the sample, preparing its surface for the study; the measuring unit approaches the sample, which is fixed in the holder, and the surface AFM scanning in one of the available modes is carried out. The obtained image is saved. After that, the measuring unit is retracted, and the ultra microtome makes another ultra thin sample slice (~20nm). Again, AFM head approaches the new freshly cut surface and another AFM image is obtained. The cycle is repeated several times. Knowing the thickness of the slices and having the saved images, we can reconstruct a 3D picture that shows the distribution of nanosized heterogeneity in the samples volume.

The approach is indispensable for the investigation of composed materials, which the most valuable properties are determined by its volume organization. As a sample we can name the materials with nanoparticles (soot, clay, etc.) are build into 3D net of polymer fiber. In this case, beside the sized of the particles, it is important to know how uniformly they are distributed in the volume of the polymer matrix. Another example is copolymers, which may contain nanosized areas that have different compound. Its structure may be rebuild and investigated using AFM tomography.


The unique instrumentation has been created for biological objects investigation

  • Proteins
  • DNA
  • Viruses
  • Bacteriums
  • Tissues

as well as is used for work with Polymers and Thin Organic Films:

  • Spherulites and dendrites
  • Polymer monocrystals
  • Polymer nanoparticles
  • LB-films
  • Thin organic films

General information

For many industrial applications it is important to have an opportunity for studying large samples, saving the data arrays according to the prescribed algorithms in automatic mode. This may be used in the quality control of optical elements surfaces, e.g. undulation of lens surface, or the study of electric parameters in the determined fields of a 100 mm silicon substrate, or the testing of a big number of microsamples of polymer material while optimizing the conditions of chemical synthesis for the ideal combination of mechanical properties. Thus, the specialization of NTEGRA Maximus is the work with large samples and gathering of big data arrays in the automatic mode.

Key features

  • Study of large and massive samples (up to 100mm in diameter, 15 mm thick, and mass up to 1 kg)
  • Analysis of matrix of one-type microsamples
  • Sequencing the system for serial measurements
  • Motorized X,Y positioning of the sample


in scientific research in education, general metrology, studies of materials (studies of metal and alloy structures, molecular, polymer, semi-conductor, magnetic, nano-structural and other materials), in studies of semi-conductor instruments, thin film properties, development of information carrier mediums, including Tb memory, manipulations at nanometric level;

in industry in semiconductor wafers production, in microelectronics, compact disk production, in metallurgy and metal processing, optical industry, material surface quality analysis, medicine and medical industry, production of powder material, paints, coating, production of data carriers and reading/recording devices for high capacity data storage devices.

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