Technical data:

  • Horizontal single reactor electric oven with resistance heating
  • Quartz reactor with sealable work zone
  • Three-section spiral heater with platinum thermocouple in each section
  • Gas system (2 – 5 channels)
  • Small-sized oil-free fore-vacuum system that includes fore-vacuum and high vacuum pumps
  • Self-contained water- and air-based cooling systems
  • Control of reactor’s heating and cooling speed
  • Microprocessor-based process control system
  • Clean-room compatibility
  • Number of simultaneously processed plates - up to 25
  • Operating temperature range 300…650 °C
  • End vacuum in reactor - up to 10–4

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Made in Zelenograd

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