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Technical data:

  • Horizontal single reactor electric oven with resistance heating
  • Quartz reactor with sealable work zone
  • Three-section spiral heater with platinum thermocouple in each section
  • Gas system (2-5 channels)
  • Control of reactors heating and cooling speed
  • Separate discharge of heavy and light gases from reactor
  • Microprocessor-based process control system
  • Clean-room compatibility
  • Number of simultaneously processed plates up to 120
  • Operating temperature range 300…1100 °C

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